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Plasma processing
Plasma
processing
is a plasma-based
material
processing
technology
that
aims
at
modifying
the
chemical
and
physical properties
of a surface.
Plasma processing
techniques
include:
Plasma
activation
Plasma
ashing
Plasma
cleaning
Plasma
electrolytic
oxidation
Plasma
etching
Plasma functionalization
Plasma
polymerization
Corona treatment
Plasma modification
Related topics
are
plasma chemistry
,
chemical vapor deposition
, and
physical vapor deposition
processes
like
sputter deposition
,
plasma
iondoping,
vacuum plasmaspraying
, and
reactive ion etching
.