Multibeam Corporation

Technology

Applications

• Direct Electron Writing embeds security information in each IC including chip ID, IP or MAC address, and chip-specific information such as keys used in encryption. Chip ID is used for supply chain traceability and to detect counterfeits. Hardware-embedded encryption keys are used to authenticate software. Chip-specific information written into DEW-bit registers is non-volatile.
• Complementary Electron Beam Lithography works with optical lithography to pattern cuts and holes with no masks.
• Direct Deposition/Etch can be used in chip fabrication or wafer defect repair. Precursors or reactants are introduced through gas injectors. Activation electrons are directed in accordance with the design layout database to deposit or remove material at precise locations on the substrate.
• Multi-column Electron Beam Inspection for wafer defect detection and metrology.